Miniaturization technologies now have important roles in materials, mechanical and biomedical engineering, in addition to being the foundation for information technology. This course provides an introduction to MEMS/NEMS fabrication techniques, selected device applications, and the design tradeoffs in developing systems.
- Roger Howe Professor, Electrical Engineering
- Electro-mechanical systems
Note on Course Availability
The course schedule is displayed for planning purposes – courses can be modified, changed, or cancelled. Course availability will be considered finalized on the first day of open enrollment. For quarterly enrollment dates, please refer to our graduate certificate homepage.
PrerequisitesAn undergraduate GPA of 3.3 or better.
For course tuition please click Tuition & Fees.